MS Series Mass Flow Meters for Corrosive Gases

Measure mass flow, volumetric flow, pressure and temperature in a compact device that will be the star of your lab.  Gas mass flow meters from Alicat are highly flexible instruments that can be used with many gases across a very wide range.  As soon as you turn on the flow meter, it’s ready to display live flow, pressure and temperature readings in your choice of engineering units.  Measure flows with NIST-traceable accuracy for a variety of gases down to 1/200th of full scale, or define your own gas composition with COMPOSER™.

The MS series is suitable for most flow measurement applications involving aggressive or corrosive gases.  In this configuration, the flow body and sensor are upgraded to 316L stainless steel and the elastomers are FFKM. The MS series is also available in a battery-powered portable configuration (MBS).

Alicat’s MS series mass flow meters feature dual digital and analog communications by default and can be ordered with Ethernet/IP, EtherCAT, DeviceNet, Profibus or Modbus (RTU and TCP/IP) communications for easy integration into your digital industrial or laboratory network.  Other build options include your choice of display, process connections, elastomeres as well as performance options.  Need further customization?  Contact us and we’d be happy to help you build the instrument you need.

Each flow meter comes with a NIST-traceable calibration certificate and an Alicat operating manual.  Power supply sold separately.

Other Alicat Mass Flow Meters
The M series is suitable for most flow measurement applications with non-corrosive gases, with models that can measure flow rates as high as 5000 slpm or as low as 0.0025 sccm.  The MW, or “Whisper”, is best for low pressure drop applications, minimizing system impact and enabling flow measurement at near-atmospheric pressures or when there is little available system pressure.  The versatile MQ flow meter is useful when your line pressures are high (160 - 320 PSIG), reducing the time it takes to verify or validate flows.