CLS-700 Corrosive Liquid Particle Sampler
Corrosive Liquid Particle Sampler: CLS-700
The CLS-700 T corrosive liquid sampler is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing effervescent chemicals. The system eliminates bubbles by pressurizing the sample and forcing the bubbles into solution.
The CLS-700 T corrosive liquid sampler can be integrated into a wet bench for continuous particle monitoring, or located on a cart for increased mobility. When integrated into the wet bench, the sampling system can be started or stopped by the tool, including automatic shutoff during a bath change, to prevent the injection of chemical foam or air into the particle counter. The CLS-700 T corrosive liquid sampler is fully compliant with SEMI C1 for particle measurement of process chemicals.
- Versatility
- Supports a wide range of applications and fluids
- Programmable particle-size thresholds
- Designed for easy mobility
- Compression sampling allows instrument to measure most chemicals, including effervescent ones
- External trigger coordinates sampling with process events
- Measurements can be made directly out of the bath
- User-Friendly
- Facility Net process control software simplifies online sampling by providing alphanumeric paging, sensor status, tabular and SPC charts, and time plots
- SamplerSight batch sampling software facilitates all aspects of data management, including sophisticated data storage, retrieval and report generation
- Designed for quick cleanup when switching from one liquid to another
- Cost Reduction
- 100% view volume means quicker process qualification
- Real-time characterization and analysis for immediate response to anomalies means less waste
- Particle level measurement in effervescent liquids
- Wet process monitoring
- Chemical process control
- Bath monitoring