Chem 20 Chemical Particle Counter
20 nm Chemical Particle Counter: Chem 20™
Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the Chem 20 Chemical Particle Counter from Particle Measuring Systems (PMS) supports the International Roadmap for Devices and Systems (IRDS) and a large variety of chemicals.
Extensive data on chemical distribution and packaging systems proves that the PMS Chem 20 sensor detects larger concentrations of particles with better statistics than competitive products; the advanced laser optics and detectors enable the detection of 20 nm polymer particles and 9 nm metallic particles in chemicals. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.
- Detect 20 nm PSL and 9 nm Au particles in real time
- Detect yield-limiting particles (not possible with competitive technologies)
- Easy online and offline 20 nm testing
- React quickly to particle excursions long before surface scan or yield data are available
- Optimize chemical delivery systems from the loading dock to point-of-process
- Tighten process control limits through improved sample population statistics
- On-board chemical flow meter to set sample flow
- Optimized for low and high refractive index chemicals:
- Chem 20 sensor, lower refractive index chemicals
- Chem 20-HI sensor, for sulfuric acid and other high-index chemicals
- On-board leak detection with internal chemical leak alarm
- Low-flow detector and alarm to ensure consistent data
- Bubble detector to optimize data and protect sensor
- Syringe sampling with the SLS-20 syringe liquid sampler
- Two view modes optimize instrument operation for very dirty or very clean application
- Local data display
- Flexible communications systems support legacy data acquisition systems
| Size range | ≥ 20 nm PSL and 9 nm Au minimum detection limit |
| Channels | 4 |
| Channel sizes | 20, 50, 70, 100 nm |
| Flow rate (ml/min) | 35 ml/min ± 10% |
| Zero count | < 100 counts per liter |
| Maximum concentration | High Resolution Mode 2500 P/ml ≥ 20 nm 1000 P/ml ≥ 100 nm |
| High Concentration Mode 500,000 P/ml > 20 nm 10,000 P/ml > 100 nm | |
| Sample temperature | 59 – 104 °F (15 – 40 °C) |
| Maximum pressure | 75 psi, max |
| Wetted surface materials | PFA, PTFE, Saphhire, Kel-FR, KalrezR 4079 |
| Exterior surface | 316L stainless steel enclosure |
| External Dimensions (l,w,h) | 20.0 x 16.8 x 11.1 in (50.8 x 42.7 x 28.3 cm) |
| Weight | 64.5 lb (29.2 kg) |
| Power | 100 - 240 VAC |
| Laser classification | Class I complies with US21 CFR 1040.10 and EN60825-1. Internally an enclosed Class IV laser is used per EN60825-1. |
| Communications | Ethernet (PMS protocol), 4-20 mA (5 outputs: 4 size channels, 1 sensor status), RS-232 (set up and diagnostics only) |
| Status indicator | LCD display and one (1) tri-color LED. Indicates operation and communication status, and laser, sample flow or internal-leak status |
| Calibration | Sensors calibrated using PSL particles in pure water. Materials used are traceable to National Institute of Standards & Technology (NIST) and/or Japanese Industrial Standards (JIS). |
| Environment | Temperature: 64 – 82 °F (18 – 28 °C) ± 1 °C/hr Humidity: 5 - 90%, Non-Condensing Sensor must be installed in a conditioned environment with stable temperature control. Indoor use only; Pollution degree 2 Isolated from excessive machinery or vehicle vibration Over-voltage (transients) Category II Ordinary protection (not protected against harmful ingress of moisture) Class I environment (Electrical earth ground from the mains power source to the product input is required for safety purposes) |
- Real-time particle monitoring for chemical distribution
- Point-of-process monitoring
- Chemical packaging operations monitoring
- Chemical filter performance and efficiency characterization
- Chemical QA and verification
- Performance testing of chemical handling components